Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by- layer, in-situ atomic layer annealing | Scientific Reports
Atomic Layer Deposition | Materials Research Institute
Coatings | Free Full-Text | Influence of Substrate Materials on Nucleation and Properties of Iridium Thin Films Grown by ALD
Schematic diagram of one cycle of atomic layer deposition (ALD) of... | Download Scientific Diagram
Full article: New development of atomic layer deposition: processes, methods and applications
Area-Selective Atomic Layer Deposition of TiN Using Trimethoxy(octadecyl)silane as a Passivation Layer | Langmuir
The Savannah ALD System - An Excellent Tool for Atomic Layer Deposition
Probing the Atomic-Scale Structure of Amorphous Aluminum Oxide Grown by Atomic Layer Deposition | ACS Applied Materials & Interfaces
Atomic Layer Deposition | Materials Research Institute
Direct Atomic Layer Deposition of Ultrathin Aluminum Oxide on Monolayer MoS2 Exfoliated on Gold: The Role of the Substrate - Schilirò - 2021 - Advanced Materials Interfaces - Wiley Online Library
Applied Sciences | Free Full-Text | Substrate-Driven Atomic Layer Deposition of High-κ Dielectrics on 2D Materials
Precursors and deposition conditions employed for the ALD coating of... | Download Scientific Diagram
Application of three-dimensionally area-selective atomic layer deposition for selectively coating the vertical surfaces of standing nanopillars | Scientific Reports
Atomic layer deposition - Wikipedia
Frontiers | Synergy of Oxygen Plasma and Al2O3 Atomic Layer Deposition on Improved Electrochemical Stability of Activated Carbon-Based Supercapacitor
Atomic and Molecular Layer Deposition of Alkali Metal Based Thin Films | ACS Applied Materials & Interfaces
Vapor-phase grafting of a model aminosilane compound to Al2O3, ZnO, and TiO2 surfaces prepared by atomic layer deposition - ScienceDirect
Advances in Atomic Layer Deposition | Nanomanufacturing and Metrology
Atomic layer deposition of aluminum oxide on modified steel substrates - ScienceDirect
Two-dimensional BN buffer for plasma enhanced atomic layer deposition of Al2O3 gate dielectrics on graphene field effect transistors | Scientific Reports
Atomic layer–deposited nanostructures and their applications in energy storage and sensing | Journal of Materials Research | Cambridge Core
Investigation of the initial deposition steps and the interfacial layer of Atomic Layer Deposited (ALD) Al2O3 on Si - ScienceDirect
Atomic Layer Deposition-Derived Nanomaterials: Oxides, Transition Metal Dichalcogenides, and Metal–Organic Frameworks | Chemistry of Materials
