Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry | Chemistry of Materials
Adopting Atomic Layer Deposition – Insights from Beneq, imec and Yole Intelligence | SEMI
How Atomic Layer Deposition Works
What is ALD (Atomic Layer Deposition) - CTECHNANO
Things You Should Know about Atomic Layer Deposition (ALD)
Atomic Layer Deposition: Most Up-to-Date Encyclopedia, News & Reviews
Atomic layer deposition - Wikipedia
The nucleation, radial growth, and bonding of TiO2 deposited via atomic layer deposition on single-walled carbon nanotubes - ScienceDirect
Slides of invited "ALD 101" tutorial by Puurunen at ALD 2021 | PPT
Atomic Layer Deposition: Fundamentals, Practice, and Challenges - ScienceDirect
Thin film encapsulation for the organic light-emitting diodes display via atomic layer deposition | Journal of Materials Research | Cambridge Core
Full article: New development of atomic layer deposition: processes, methods and applications
Comparison of the Atomic Layer Deposition of Tantalum Oxide Thin Films Using Ta(NtBu)(NEt2)3, Ta(NtBu)(NEt2)2Cp, and H2O | ACS Applied Materials & Interfaces
A brief review of atomic layer deposition: from fundamentals to applications - ScienceDirect
Full article: New development of atomic layer deposition: processes, methods and applications
Solution Atomic Layer Deposition of Smooth, Continuous, Crystalline Metal–Organic Framework Thin Films | Chemistry of Materials
Inhibitor-Free Area-Selective Atomic Layer Deposition with Feature Size Down to Nearly 10 nm | Chemistry of Materials
Atomic layer deposition market size to grow by USD 2,003.37 million between 2022 and 2027; Growth driven by high demand from the semiconductor and electronics industries - Technavio
Atomic Layer Deposition-Derived Nanomaterials: Oxides, Transition Metal Dichalcogenides, and Metal–Organic Frameworks | Chemistry of Materials
Chemistry at the bottom: Atomic layer deposition - Materials Today
Kurt J. Lesker Company | Atomic Layer Deposition Systems | Enabling Technology for a Better World
Resolving the Heat of Trimethylaluminum and Water Atomic Layer Deposition Half-Reactions | Journal of the American Chemical Society
Coatings | Free Full-Text | The Effect of Deposition Temperature of TiN Thin Film Deposition Using Thermal Atomic Layer Deposition
Atomic layer deposition - Wikipedia
Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride | The Journal of Physical Chemistry Letters
